On the suppression of hydrogen degradation in PbZr(sub 0.4)Ti(sub 0.6)O(sub 3) ferroelectric capacitors with PtO(sub x) top electrode

The effect of oxygen content in the sputtered Pt oxide (Pt(sub x), x = 0.4 to 1) top electrode suppressing the hydrogen degradation of ferroelectric capacitors of PbZr(sub 0.4)Ti(sub 0.6)O3 (PZT) and also the role of hydrogen in degradation of ferroelectric capacitors are investigated. The results show that the high oxygen content in PtO(sub x) electrode interrupts the catalytic reaction of Pt in dissociation of hydrogen molecules and suppresses the interfacial segregation of hydrogen and its incorporation with PZT.