Piezoelectric micromachined ultrasonic transducers based on PZT thin films

Authors :: Muralt, Paul
Ledermann, Nicolas
Baborowski, Jacek
Barzegar, Abdolghaffar
Gentil, Sandrine
Belgaccem, Brahim
Petitgrand, Sylvain
Bosseboeuf, Alain
Setter, Nava
Source :: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. Dec, 2005, Vol. 52 Issue 12, p2276, 13 p.
Publication Year :: 2005
Abstract: A study of fabrication and characterization results of piezoelectric micromachined ultrasonic transducers (pMUTs) based on 2-micrometer thick Pb(Zro.53Tio.47O3) (PZT) thin films is described. A transmit-receive experiment with two quasi-identical pMUTs showed significant signal transmission up to a distance of 20cm in air and 2 cm in the test liquid.

Subjects :: Ultrasonic transducers -- Design and construction
Dielectric films -- Design and construction
Thin films -- Design and construction
Titanates -- Electric properties
Lead compounds -- Electric properties
Business
Electronics
Electronics and electrical industries

Language :: English
ISSN :: 08853010
Volume :: 52
Issue :: 12
Database :: Gale General OneFile
Journal :: IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Publication Type :: Academic Journal
Accession number :: edsgcl.143676856

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