Fabrication and characterization of piezoelectric micromachined ultrasonic transducers with thick composite PZT films

A diaphragm-type piezoelectric micromachined ultrasonic transducer (pMUT), a composite coating technique based on chemical solution deposition and high-energy ball milled powder used to fabricate thick PZT films, and micromachining of the pMUTs using thick films is investigated. Results suggested that the fabricated pMUT has very good ultrasound-radiating performance and can be used to compose pMUT arrays for generating ultrasound beam with high directivity in numerous applications.