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Characterization of micromachined ultrasonic transducers using light diffraction tomography

Authors :
Almqvist, Monica
Torndahl, Marcus
Nilsson, Mikael
Lilliehorn, Tobias
Source :
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. Dec, 2005, Vol. 52 Issue 12, p2298, 5 p.
Publication Year :
2005

Abstract

Usage of light diffraction tomography to measure the acoustic field of micromachined ultrasonic transducers (MUT) in cases in which standard methods like hydrophone and microphone measurements fail is demonstrated. The results reveal that the air-coupled MUTs in the frequency range of about 1MHz as well as the extreme near field of a miniaturized continuous wave 10 MHz water-loaded transducer were successfully characterized with light diffraction tomography.

Details

Language :
English
ISSN :
08853010
Volume :
52
Issue :
12
Database :
Gale General OneFile
Journal :
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
Publication Type :
Academic Journal
Accession number :
edsgcl.143676859