Crystallization of coevaporated and ion-irradiated amorphous CoSi2

Amorphous CoSi2 is studied to determine the effect of ion beam irradiation on crystalline kinetics of amorphous CoSi2. Three dimensional growth of existing nuclei influences the crystallization kinetics of as-deposited CoSi2. The existing nuclei is amorphized by ion beam irradiation of as-deposited CoSi2. Direct amorphization is caused by heavy-ion irradiation. Variation in the growth mode from three-dimensional to two-dimensional decreases the density of preexisting nuclei.