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Formation of waveguides in LiNb[O.sub.3] by 6.0 MeV [F.sup.3+] implantation
- Source :
- Journal of Applied Physics. August 1, 2006, Vol. 100 Issue 3, 033505-1-033505-4
- Publication Year :
- 2006
-
Abstract
- The waveguides in x-cut LiNb[O.sub.3] fabricated by 6.0 MeV [F.sup.3+] ion implantation with different doses are reported. The mode and loss patterns are analyzed and found that the waveguide structures fabricated by 6.0 MeV[F.sup.3+] ion implantation can be tailored for valuable usage based on an appropriate implanted dose.
Details
- Language :
- English
- ISSN :
- 00218979
- Volume :
- 100
- Issue :
- 3
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.152777503