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Two-dimensional simulation of ac-driven microplasmas confined to 100-300 (mu)m diameter cylindrical microcavities in dielectric barrier devices

Authors :
Jeong Hyun Seo
Eden, J. Gary
Source :
Journal of Applied Physics. Dec 15, 2006, Vol. 100 Issue 12, p123302-1, 8 p.
Publication Year :
2006

Abstract

A two-dimensional fluid simulation of microplasmas is used to study the ac-driven cylindrical microactivity plasma devices. The analysis reveals that an annular discharge can be easily produced by increasing the gas pressure, which in turn leads to a negative glow in the vicinity of the microcavity wall.

Details

Language :
English
ISSN :
00218979
Volume :
100
Issue :
12
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.160450444