High-pressure and high-temperature furnace oxidation for advanced poly-buffered LOCOS

Authors :: Kim, Sang S.
Emani, Alan
Deleonibus, Simon
Source :: Solid State Technology. November, 1994, Vol. 37 Issue 11, p67, 4 p.
Publication Year :: 1994
Abstract: Bird's beak encroachment and oxide thinning in local oxidation of silicon (LOCOS) field oxidation are becoming the limiting factors for advanced isolation of sub-0.5-[µmeter] devices. This article introduces an application […]

Subjects :: Semiconductor industry
Semiconductor device
Integrated circuit fabrication
Semiconductor industry -- Production management -- Methods
Semiconductor preparation -- Methods
Integrated circuit fabrication -- Methods

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