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Selective deposition of silicon at room temperature using dc microplasmas
- Source :
- IEEE Transactions on Plasma Science. June, 2007, Vol. 35 Issue 3, p573, 5 p.
- Publication Year :
- 2007
-
Abstract
- This paper reports deposition of silicon at elevated and room temperatures in spatially localized areas of a microchip by plasma-enhanced chemical vapor deposition using microplasmas. The microplasmas are generated by providing dc power to thin-film Ti electrodes patterned on the microchip. Electrode arrangements include configurations in which multiple cathode elements share a single anode. At the operating pressures used, the plasma glow is confined to the region directly over the energized cathodes only, and the deposition is localized to these regions. A silane ambient allows Si to be deposited at 6.7-15.9 nm/min using cathode power densities of 3.65-9.35 W/[cm.sup.2], with the substrate heated to 300 [degrees]C. At room temperature, deposition rates up to 4.2 nm/min are realized. Also described is a plasma-coupling technique that permits isolated metal pads to be powered by plasma spreading from a proximate cathode at certain levels of power and pressure. This permits controlled variations of silicon thickness in a subarray of unbiased electrodes, simplifying the powering scheme. Index Terms--Plasma-enhanced chemical vapor deposition (PECVD), polysilicon, thin-film deposition.
Details
- Language :
- English
- ISSN :
- 00933813
- Volume :
- 35
- Issue :
- 3
- Database :
- Gale General OneFile
- Journal :
- IEEE Transactions on Plasma Science
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.165820233