The influence of boron doping on the structure and thermal decomposition of ultrathin C/B:H films

Authors :: Schenk, A.
Winter, B.
Lutterloh, C.
Biener, J.
Schubert, U.A.
Kuppers, J.
Source :: Journal of Applied Physics. June 1, 1995, Vol. 77 Issue 11, p6006, 9 p.
Publication Year :: 1995

Subjects :: Semiconductor doping -- Research
Decomposition (Chemistry) -- Research
Semiconductor films -- Research
Boron -- Research
Physics

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