Measurement of the dc resistance of semiconductor thin film-gas systems: comparison to several transport models

Authors :: Carrico, Barbara
Saredy, J.
Tracy, J.L.
Patel, N.G.
Garner, J.
Gasparov, L.
Source :: Journal of Applied Physics. Oct 15, 2007, Vol. 102 Issue 8, 083714-1-083714-7
Publication Year :: 2007
Abstract: The dc resistance of a thin film semiconductor, an indium tin oxide (ITO), exposed to various gases is examined. The results have shown that the ITO thin film is sensitive to different gases and can serve as a practical means of identifying gases.

Subjects :: Direct current -- Measurement
Dielectric films -- Electric properties
Thin films -- Electric properties
Tin compounds -- Electric properties
Maxwell equations -- Analysis
Physics

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