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Three-dimensional nanofabrication with elastomeric phase masks
- Source :
- Journal of Physical Chemistry B. Nov 15, 2007, Vol. 111 Issue 45, p12945, 14 p.
- Publication Year :
- 2007
-
Abstract
- Review is presented on an optical technique for fabricating in a single step three dimensional (3D) nanostructures with diverse structural layouts. These structures illustrate its capabilities and possible areas of use in technologies.
Details
- Language :
- English
- ISSN :
- 15206106
- Volume :
- 111
- Issue :
- 45
- Database :
- Gale General OneFile
- Journal :
- Journal of Physical Chemistry B
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.174229443