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Structural characterization of ion-beam synthesized NiSi2 layers

Authors :
Wu, M.F.
Wachter, J. de
Bavel, A.-M. van
Moons, R.
Vantomme, A.
Pattyn, H.
Langouche, G.
Bender, H.
Vanhellemont, J.
Temst, K.
Bruynseraede, Y.
Source :
Journal of Applied Physics. August 1, 1995, Vol. 78 Issue 3, p1707, 6 p.
Publication Year :
1995

Details

ISSN :
00218979
Volume :
78
Issue :
3
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.17604302