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Epitaxial growth of CoSiO2 layer on (100)Si and facet formation at the CoSi/Si interface

Authors :
Byun, Jeong Soo
Kim, Do-Heyoung
Woo Shik Kim
Kim, Hyeong Joon
Source :
Journal of Applied Physics. August 1, 1995, Vol. 78 Issue 3, p1725, 6 p.
Publication Year :
1995

Details

ISSN :
00218979
Volume :
78
Issue :
3
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.17604308