Electrical, optical, and structural characteristics of [Al.sub.2][O.sub.3] thin films prepared by pulsed ultrasonic sprayed pyrolysis

Authors :: Carmona-Tellez, S.
Guzman-Mendoza
Aguilar-Frutis, M.
Alarcon-Flores, G.
Garcia-Hipolito, M.
Canseco, M.A.
Falcony, C.
Source :: Journal of Applied Physics. Feb 1, 2008, Vol. 103 Issue 3, 034105-1-034105-7
Publication Year :: 2008
Abstract: The optical, structural, and electrical characteristics of aluminum oxide thin films deposited by pulsed ultrasonic sprayed pyrolysis are described. The results have shown that these films possessed high dielectric constant and very good optical and structural properties.

Subjects :: Aluminum oxide -- Structure
Aluminum oxide -- Electric properties
Aluminum oxide -- Optical properties
Dielectric heating -- Analysis
Pyrolysis -- Analysis
Physics

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