Cite
PECVD Si[O.sub.2]/[Si.sub.3][N.sub.4] double layers electrets on glass substrate
MLA
Chen, Zhiyu, et al. “PECVD Si[O.Sub.2]/[Si.Sub.3][N.Sub.4] Double Layers Electrets on Glass Substrate.” IEEE Transactions on Dielectrics and Electrical Insulation, vol. 15, no. 4, Aug. 2008, p. 915. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.183316904&authtype=sso&custid=ns315887.
APA
Chen, Z., Lv, Z., & Zhang, J. (2008). PECVD Si[O.sub.2]/[Si.sub.3][N.sub.4] double layers electrets on glass substrate. IEEE Transactions on Dielectrics and Electrical Insulation, 15(4), 915.
Chicago
Chen, Zhiyu, Zhiqiu Lv, and Jinwen Zhang. 2008. “PECVD Si[O.Sub.2]/[Si.Sub.3][N.Sub.4] Double Layers Electrets on Glass Substrate.” IEEE Transactions on Dielectrics and Electrical Insulation 15 (4): 915. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.183316904&authtype=sso&custid=ns315887.