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Accurate extraction of effective channel length and source/drain series resistance in ultrashort-channel MOSFETs by iteration method

Authors :
Junsoo Kim
Jaehong Lee
Ickhyun Song
Yeonam Yun
Jong Duk Lee
Byung-Gook Park
Hyungcheol Shin
Source :
IEEE Transactions on Electron Devices. Oct, 2008, Vol. 55 Issue 10, p2779, 6 p.
Publication Year :
2008

Abstract

An improved channel resistance method using iterative procedure for extraction of effective channel length and source/drain series resistance in ultrashort-channel MOSFETs is described. This method takes into account the degradation in mobility in shorter channel devices and by compensating for the mobility in long channels a more accurate effective channel length and source/drain series resistance is obtained.

Details

Language :
English
ISSN :
00189383
Volume :
55
Issue :
10
Database :
Gale General OneFile
Journal :
IEEE Transactions on Electron Devices
Publication Type :
Academic Journal
Accession number :
edsgcl.189853068