Length and thickness dependence of longitudinal flexural resonance frequency shifts of a piezoelectric microcantilever sensor due to Young's modulus change

The dependence of the longitudinal flexural resonance frequency shift of a [(Pb[Mg.sub.1/3][O.sub.3]).sub.0.63][(PbTi[O.sub.3]).sub.0.37] (PMN-PT) piezoelectric microcantilever sensors (PEMS) displaying a Young's modulus-change mechanism on its thickness and length is examined. It is shown that the resonance frequency shift caused by Young's modulus change in the piezoelectric layer is more than 300 times larger than that is expected from the mass change.