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A novel biasing technique for addressable parametric arrays
- Source :
- IEEE Transactions on Semiconductor Manufacturing. Feb, 2009, Vol. 22 Issue 1, p134, 12 p.
- Publication Year :
- 2009
-
Abstract
- Addressable arrays that use switches to isolate the devices being tested are limited in size and utility by the parasitic leakage caused by those switches. A new biasing technique that reduces the leakage of these switches has been studied to address this problem. Simulations performed in a 90 nm low-power technology predicted almost a two-decade drop in parasitic leakage of the array. Experimental data confirmed this improvement. 1 x 32 and 4 x 32 arrays using this biasing technique were used to investigate probe pad effects, device variability and geometry dependence. Index Terms--MOSFET array, parametric test, probe pads, source biasing, test structure design, variability.
Details
- Language :
- English
- ISSN :
- 08946507
- Volume :
- 22
- Issue :
- 1
- Database :
- Gale General OneFile
- Journal :
- IEEE Transactions on Semiconductor Manufacturing
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.194332182