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A novel biasing technique for addressable parametric arrays

Authors :
Smith, Brad
Arriordaz, Alexandre
Kolagunta, Venkat
Schmidt, Jeff
Shroff, Mehul
Source :
IEEE Transactions on Semiconductor Manufacturing. Feb, 2009, Vol. 22 Issue 1, p134, 12 p.
Publication Year :
2009

Abstract

Addressable arrays that use switches to isolate the devices being tested are limited in size and utility by the parasitic leakage caused by those switches. A new biasing technique that reduces the leakage of these switches has been studied to address this problem. Simulations performed in a 90 nm low-power technology predicted almost a two-decade drop in parasitic leakage of the array. Experimental data confirmed this improvement. 1 x 32 and 4 x 32 arrays using this biasing technique were used to investigate probe pad effects, device variability and geometry dependence. Index Terms--MOSFET array, parametric test, probe pads, source biasing, test structure design, variability.

Details

Language :
English
ISSN :
08946507
Volume :
22
Issue :
1
Database :
Gale General OneFile
Journal :
IEEE Transactions on Semiconductor Manufacturing
Publication Type :
Academic Journal
Accession number :
edsgcl.194332182