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On the transient gas flow through catalytically active micromachined channels
- Source :
- Journal of Applied Physics. March 1, 1997, Vol. 81 Issue 5, p2094, 7 p.
- Publication Year :
- 1997
- Subjects :
- Gas flow -- Measurement
Thin films -- Evaluation
Glass -- Fluid dynamics
Physics
Subjects
Details
- ISSN :
- 00218979
- Volume :
- 81
- Issue :
- 5
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.19511576