Excimer laser micromachining for rapid fabrication of diffractive optical elements

We demonstrate the fabrication of binary, multilevel, and blazed diffractive structures by a fast and flexible direct-write process by using an excimer-laser-based tabletop micromachining workstation with an integrated optical surface profiler. Key words: Diffractive optical elements, excimer lasers, laser ablation, micromachining, direct write.