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Dendritic crystallization of amorphous germanium by in situ thermal pulse annealing

Authors :
Lui, K.M.
Chik, K.P.
Xu, J.B.
Source :
Journal of Applied Physics. June 15, 1997, Vol. 81 Issue 12, p7757, 7 p.
Publication Year :
1997

Abstract

In situ thermal pulse annealing of amorphous substrate to effect amorphous-germanium thin film phase transformation showed a film microstructure dependent on annealing ambient and exposure time. Air annealing showed hillock growth mode, while vacuum annealing produced a shift from microgranular to dendritic grain growth. The results indicate the possibility of Ge film presence in supercooled semiconductive liquid condition prior to crystallization.

Details

ISSN :
00218979
Volume :
81
Issue :
12
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.19789391