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Dendritic crystallization of amorphous germanium by in situ thermal pulse annealing
- Source :
- Journal of Applied Physics. June 15, 1997, Vol. 81 Issue 12, p7757, 7 p.
- Publication Year :
- 1997
-
Abstract
- In situ thermal pulse annealing of amorphous substrate to effect amorphous-germanium thin film phase transformation showed a film microstructure dependent on annealing ambient and exposure time. Air annealing showed hillock growth mode, while vacuum annealing produced a shift from microgranular to dendritic grain growth. The results indicate the possibility of Ge film presence in supercooled semiconductive liquid condition prior to crystallization.
Details
- ISSN :
- 00218979
- Volume :
- 81
- Issue :
- 12
- Database :
- Gale General OneFile
- Journal :
- Journal of Applied Physics
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.19789391