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Thermal immune Ni germanide for high performance Ge MOSFETs on Ge-on-Si substrate utilizing [Ni.sub.0.95][Pd.sub.0.05] alloy

Authors :
Ying-Ying Zhang
Jungwoo Oh.
In-Shik Han
Zhun Zhong
Shi-Guang Li
Soon-Yen Jung
Kee-Young Park
Hong-Sik Shin
Won-Ho Choi
Hyuk-Min Kwon
Wei-Yip Loh
Majhi, Prashant
Jammy, Raj
Hi-Deok Lee
Source :
IEEE Transactions on Electron Devices. Feb, 2009, Vol. 56 Issue 2, p348, 6 p.
Publication Year :
2009

Abstract

Pd incorporated Ni germanide is used to construct highly thermally stable Ni germanide technology for high performance germanium metal-oxide-semiconductor field-effect transistors (Ge MOSFETs). The developed [Ni.sub.0.95][Pd.sub.0.05] alloy could find potential use for the high mobility Ge MOSFET applications.

Details

Language :
English
ISSN :
00189383
Volume :
56
Issue :
2
Database :
Gale General OneFile
Journal :
IEEE Transactions on Electron Devices
Publication Type :
Academic Journal
Accession number :
edsgcl.200145015