Toward a better physical understanding of a-Si:H/c-Si heterojunction solar cells

The study has helped in understanding the role of hydrogen and ion bombardment during the plasma deposition as well as the effect of an epitaxial layer. The results have shown that hydrogen has played a major role in preparing high efficiency heterojunction solar cells and also the effects of the [H.sub.2] plasma has depended on the resistivity of the c-Si wafer.