High-speed operation of a gas-bearing supported MEMS-air turbine

Silicon based power micro-electro-mechanical system (MEMS) applications require high-speed microrotating machinery operating stably over a large range of operating conditions. The technical barriers to achieving stable high-speed operation with micro-gas-bearings are governed by (1) stringent fabrication tolerance requirements and manufacturing repeatability, (2) structural integrity of the silicon rotors, (3) rotordynamic coupling effects due to leakage flows, (4) bearing losses and power requirements, and (5) transcritical operation and whirl instability issues. To enable high-power density the micro-turbomachinery must be run at tip speeds comparable to conventional scale turbomachinery. The rotors of the micro-gas turbines are supported by hydrostatic gas journal and hydrostatic gas thrust bearings. Dictated by fabrication constraints the location of the gas journal bearings is at the outer periphery of the rotor The high bearing surface speeds (target nearly 10 x [10.sup.6] mm rpm), the very low bearing aspect ratios (L/D