Impact of high-thermal budget anneals on polysilicon as a micromechanical material

Authors :: Gianchandani, Yogesh B.
Shinn, Meenan
Najafi, Khalil
Source :: Journal of Microelectromechanical Systems. March, 1998, Vol. 7 Issue 1, p102, 4 p.
Publication Year :: 1998

Subjects :: Polysilicon -- Evaluation
Annealing -- Evaluation
Nanotechnology -- Equipment and supplies
Engineering and manufacturing industries
Science and technology

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