A microvalve with integrated sensors and customizable normal state for low-temperature operation

Authors :: Park, Jong M.
Evans, Allan T.
Rasmussen, Kristian
Brosten, Tyler R.
Nellis, Gregory F.
Klein, Sanford A.
Gianchandani, Yogesh B.
Source :: Journal of Microelectromechanical Systems. August, 2009, Vol. 18 Issue 4, p868, 10 p.
Publication Year :: 2009

Subjects :: Mechanics -- Research
Engineering and manufacturing industries
Science and technology

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