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Low-temperature fabricated TFTs on polysilicon stripes
- Source :
- IEEE Transactions on Electron Devices. August, 2009, Vol. 56 Issue 8, p1637, 8 p.
- Publication Year :
- 2009
-
Abstract
- A novel approach is described for making high-performance CMOS at low temperatures. CMOS inverters and fully functional 51-stage ring oscillators are fabricated in this process and this process is used for large-area TFT electronics as well as a functional stack layer in 3-D integration.
Details
- Language :
- English
- ISSN :
- 00189383
- Volume :
- 56
- Issue :
- 8
- Database :
- Gale General OneFile
- Journal :
- IEEE Transactions on Electron Devices
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.207027244