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Canon U.S.A

Authors :
McGrath, Dylan
Source :
Electronic News (1991). July 13, 1998, Vol. 44 Issue 2227, p66, 1 p.
Publication Year :
1998

Abstract

Canon U.S.A., Inc.'s Semiconductor Equipment division, Santa Clara, Calif., introduced the FPA-5000ES2 scanning stepper. Canon bills the product as the industry's first 248-nanometer, deep-ultraviolet, step-and-scan system capable of realizing 0.18-micron […]

Details

Language :
English
ISSN :
10616624
Volume :
44
Issue :
2227
Database :
Gale General OneFile
Journal :
Electronic News (1991)
Publication Type :
Periodical
Accession number :
edsgcl.20907404