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The role of carbon and dysprosium in Ni[Dy]Si:C contacts for Schottky-barrier height reduction and application in N-channel MOSFETs with Si:C source/drain stressors

Authors :
Lee, R. T. P.
Koh, A. T.-Y.
Tan, K.-M.
Liow, T.-Y.
Chi, D. Z.
Yeo, Y.-C.
Source :
IEEE Transactions on Electron Devices. Nov, 2009, Vol. 56 Issue 11, p2770, 8 p.
Publication Year :
2009

Details

Language :
English
ISSN :
00189383
Volume :
56
Issue :
11
Database :
Gale General OneFile
Journal :
IEEE Transactions on Electron Devices
Publication Type :
Academic Journal
Accession number :
edsgcl.211529394