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Understanding and controlling wafer charging damage

Authors :
Lukaszek, Wes
Source :
Solid State Technology. June, 1998, Vol. 41 Issue 6, p101, 7 p.
Publication Year :
1998

Abstract

Although wafer charging damage has been studied for the last 20 years, the recent emergence of conferences devoted exclusively to this topic [1] underscores the importance of this vexing problem […]

Subjects

Subjects :
Standard IC
Semiconductor wafers -- Production processes
Integrated circuits -- Production processes
Semiconductor chips -- Production processes

Details

Language :
English
ISSN :
0038111X
Volume :
41
Issue :
6
Database :
Gale General OneFile
Journal :
Solid State Technology
Publication Type :
Periodical
Accession number :
edsgcl.21188486

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