Composition influence on the physical and electrical properties of [Sr.sub.x][Ti.sub.1-x][O.sub.y]-based metal-insulator-metal capacitors prepared by atomic layer deposition using TiN bottom electrodes

MLA

Menou, N., et al. “Composition Influence on the Physical and Electrical Properties of [Sr.Sub.x][Ti.Sub.1-x][O.Sub.y]-Based Metal-Insulator-Metal Capacitors Prepared by Atomic Layer Deposition Using TiN Bottom Electrodes.” Journal of Applied Physics, vol. 106, no. 9, Nov. 2009, p. 094101. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.215330543&authtype=sso&custid=ns315887.

APA

Menou, N., Popovici, M., Clima, S., Opsomer, K., Polspoel, W., Kaczer, B., Rampelberg, G., Tomida, K., Pawlak, M. A., Detavernier, C., Pierreux, D., Swerts, J., Maes, J. W., Manger, D., & Badylevich, M. (2009). Composition influence on the physical and electrical properties of [Sr.sub.x][Ti.sub.1-x][O.sub.y]-based metal-insulator-metal capacitors prepared by atomic layer deposition using TiN bottom electrodes. Journal of Applied Physics, 106(9), 094101.

Chicago

Menou, N., M. Popovici, S. Clima, K. Opsomer, W. Polspoel, B. Kaczer, G. Rampelberg, et al. 2009. “Composition Influence on the Physical and Electrical Properties of [Sr.Sub.x][Ti.Sub.1-x][O.Sub.y]-Based Metal-Insulator-Metal Capacitors Prepared by Atomic Layer Deposition Using TiN Bottom Electrodes.” Journal of Applied Physics 106 (9): 094101. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.215330543&authtype=sso&custid=ns315887.