Cite
Composition influence on the physical and electrical properties of [Sr.sub.x][Ti.sub.1-x][O.sub.y]-based metal-insulator-metal capacitors prepared by atomic layer deposition using TiN bottom electrodes
MLA
Menou, N., et al. “Composition Influence on the Physical and Electrical Properties of [Sr.Sub.x][Ti.Sub.1-x][O.Sub.y]-Based Metal-Insulator-Metal Capacitors Prepared by Atomic Layer Deposition Using TiN Bottom Electrodes.” Journal of Applied Physics, vol. 106, no. 9, Nov. 2009, p. 094101. EBSCOhost, widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.215330543&authtype=sso&custid=ns315887.
APA
Menou, N., Popovici, M., Clima, S., Opsomer, K., Polspoel, W., Kaczer, B., Rampelberg, G., Tomida, K., Pawlak, M. A., Detavernier, C., Pierreux, D., Swerts, J., Maes, J. W., Manger, D., & Badylevich, M. (2009). Composition influence on the physical and electrical properties of [Sr.sub.x][Ti.sub.1-x][O.sub.y]-based metal-insulator-metal capacitors prepared by atomic layer deposition using TiN bottom electrodes. Journal of Applied Physics, 106(9), 094101.
Chicago
Menou, N., M. Popovici, S. Clima, K. Opsomer, W. Polspoel, B. Kaczer, G. Rampelberg, et al. 2009. “Composition Influence on the Physical and Electrical Properties of [Sr.Sub.x][Ti.Sub.1-x][O.Sub.y]-Based Metal-Insulator-Metal Capacitors Prepared by Atomic Layer Deposition Using TiN Bottom Electrodes.” Journal of Applied Physics 106 (9): 094101. http://widgets.ebscohost.com/prod/customlink/proxify/proxify.php?count=1&encode=0&proxy=&find_1=&replace_1=&target=https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&scope=site&db=edsggo&AN=edsgcl.215330543&authtype=sso&custid=ns315887.