Electrical modeling and characterization of through silicon via for three-dimensional ICs

Subjects

Subjects :

Electric resistance -- Measurement
Integrated circuits -- Design and construction
Semiconductor chips -- Design and construction
Silicon -- Electric properties
Standard IC
Business
Electronics
Electronics and electrical industries

Details

Language :

English

ISSN :

00189383

Volume :

57

Issue :

1

Database :

Gale General OneFile

Journal :

IEEE Transactions on Electron Devices

Publication Type :

Academic Journal

Accession number :

edsgcl.216926768