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Ferrite-enhanced U-shaped internal antenna for large-area inductively coupled plasma system

Authors :
Kyong Nam Kim
Jong Hyeuk Lim
Woong Sun Lim
Geun Young Yeom
Source :
IEEE Transactions on Plasma Science. Feb, 2010, Vol. 38 Issue 2, p133, 4 p.
Publication Year :
2010

Details

Language :
English
ISSN :
00933813
Volume :
38
Issue :
2
Database :
Gale General OneFile
Journal :
IEEE Transactions on Plasma Science
Publication Type :
Academic Journal
Accession number :
edsgcl.223348686