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Ferrite-enhanced U-shaped internal antenna for large-area inductively coupled plasma system
- Source :
- IEEE Transactions on Plasma Science. Feb, 2010, Vol. 38 Issue 2, p133, 4 p.
- Publication Year :
- 2010
Details
- Language :
- English
- ISSN :
- 00933813
- Volume :
- 38
- Issue :
- 2
- Database :
- Gale General OneFile
- Journal :
- IEEE Transactions on Plasma Science
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.223348686