Fabrication and application of 3-D magnetically driven microtools

Authors :: Yamanishi, Y.
Sakuma, S.
Kihara, Y.
Arai, F.
Source :: Journal of Microelectromechanical Systems. April, 2010, Vol. 19 Issue 2, p350, 7 p.
Publication Year :: 2010

Subjects :: Actuators -- Design and construction
Microelectromechanical systems -- Design and construction
Microelectromechanical systems -- Usage
Photolithography -- Usage
Engineering and manufacturing industries
Science and technology

Tools