Novel capacitive pressure sensor

Subjects

Subjects :

Aluminum -- Magnetic properties
Aluminum -- Electric properties
Barium compounds -- Mechanical properties
Barium compounds -- Electric properties
Microelectromechanical systems -- Design and construction
Strontium -- Mechanical properties
Strontium -- Electric properties
Titanium -- Mechanical properties
Titanium -- Electric properties
Engineering and manufacturing industries
Science and technology

Details

Language :

English

ISSN :

10577157

Volume :

19

Issue :

3

Database :

Gale General OneFile

Journal :

Journal of Microelectromechanical Systems

Publication Type :

Academic Journal

Accession number :

edsgcl.232327382