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Smooth success: chemical mechanical planarization is becoming indispensable in chip-making

Authors :
McCoy, Michael
Source :
Chemical & Engineering News. July 12, 2010, Vol. 88 Issue 28, p16, 3 p.
Publication Year :
2010

Abstract

Cabot Microelectronics and Dow dominate the chemical mechanical planarization consumables market. This process is increasingly being used in the semiconductor industry and chemical companies need to create new materials as the process is used in new applications.

Details

Language :
English
ISSN :
00092347
Volume :
88
Issue :
28
Database :
Gale General OneFile
Journal :
Chemical & Engineering News
Publication Type :
Periodical
Accession number :
edsgcl.233010341