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Effect of capacitor installed in series with a ferrite-enhanced internal linear-t6ype antenna on the properties of an inductively coupled plasma
- Source :
- IEEE Transactions on Plasma Science. June, 2010, Vol. 38 Issue 6, p1499, 6 p.
- Publication Year :
- 2010
Details
- Language :
- English
- ISSN :
- 00933813
- Volume :
- 38
- Issue :
- 6
- Database :
- Gale General OneFile
- Journal :
- IEEE Transactions on Plasma Science
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.233558356