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Effect of capacitor installed in series with a ferrite-enhanced internal linear-t6ype antenna on the properties of an inductively coupled plasma

Authors :
Gwang Ho Gweon
Jong Hyeuk Lim
Seung Pyo Hong
Geun Young Yeom
Source :
IEEE Transactions on Plasma Science. June, 2010, Vol. 38 Issue 6, p1499, 6 p.
Publication Year :
2010

Details

Language :
English
ISSN :
00933813
Volume :
38
Issue :
6
Database :
Gale General OneFile
Journal :
IEEE Transactions on Plasma Science
Publication Type :
Academic Journal
Accession number :
edsgcl.233558356