The effects of relative humidity and reducing gases on the temperature coefficient of resonant frequency of ZnO based film bulk acoustic wave resonator

Subjects

Subjects :

Humidity -- Analysis
Resonators -- Design and construction
Sound-waves -- Analysis
Zinc oxide -- Acoustic properties
Zinc oxide -- Electric properties
Business
Electronics
Electronics and electrical industries

Details

Language :

English

ISSN :

08853010

Volume :

57

Issue :

9

Database :

Gale General OneFile

Journal :

IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control

Publication Type :

Academic Journal

Accession number :

edsgcl.242066121