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Vertical high- Q RF-MEMS devices for reactive lumped-element circuits

Authors :
Klymyshyn, D.M.
Borner, M.
Haluzan, D.T.
Santosa, E.G.
Schaffer, M.
Achenbach, S.
Mohr, J.
Source :
IEEE Transactions on Microwave Theory and Techniques. Nov, 2010, Vol. 58 Issue 11, p2976, 11 p.
Publication Year :
2010

Subjects

Subjects :
Capacitors -- Usage
Microelectromechanical systems -- Design and construction
Varactors -- Design and construction
X-ray lithography -- Usage
Business
Computers
Electronics
Electronics and electrical industries

Details

Language :
English
ISSN :
00189480
Volume :
58
Issue :
11
Database :
Gale General OneFile
Journal :
IEEE Transactions on Microwave Theory and Techniques
Publication Type :
Academic Journal
Accession number :
edsgcl.245283809

Tools

Authors Abstract Subjects Details