Properties of TiAlCN/VCN nanoscale multilayer coatings deposited by mixed high-power impulse magnetron sputtering (HiPIMS) and unbalanced magnetron sputtering processes-impact of HiPIMS during coating

Authors :: Kamath, G.
Ehiasarian, A.P.
Hovsepian, P.E.
Source :: IEEE Transactions on Plasma Science. Nov, 2010, Vol. 38 Issue 11, p3062, 9 p.
Publication Year :: 2010

Subjects :: Titanium compounds -- Thermal properties
Aluminum -- Thermal properties
Magnetrons -- Analysis
Irradiation -- Analysis
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