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Generating cycle time-throughput curves using effective process time based aggregate modeling
- Source :
- IEEE Transactions on Semiconductor Manufacturing. Nov, 2010, Vol. 23 Issue 4, p517, 10 p.
- Publication Year :
- 2010
Details
- Language :
- English
- ISSN :
- 08946507
- Volume :
- 23
- Issue :
- 4
- Database :
- Gale General OneFile
- Journal :
- IEEE Transactions on Semiconductor Manufacturing
- Publication Type :
- Academic Journal
- Accession number :
- edsgcl.249569207