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Generating cycle time-throughput curves using effective process time based aggregate modeling

Authors :
Veeger, C.P.L.
Etman, L.F.P.
Herk, J. van
Rooda, J.E.
Source :
IEEE Transactions on Semiconductor Manufacturing. Nov, 2010, Vol. 23 Issue 4, p517, 10 p.
Publication Year :
2010

Details

Language :
English
ISSN :
08946507
Volume :
23
Issue :
4
Database :
Gale General OneFile
Journal :
IEEE Transactions on Semiconductor Manufacturing
Publication Type :
Academic Journal
Accession number :
edsgcl.249569207