Microfluidic MEMS for semiconductor processing

A study was conducted to examine the use of a microelectromechanical system-based thermopneumatic valve, pressure regulator and mass flow controller technologies to develop ultraclean equipment for electronics specialty gas distribution. Flow models were utilized to determine stead-state behavior of the mass flow controllers. Results indicated that microelectromechanical system-based electronics specialty gas distribution equipment can integrate higher resolution and support better materials compatibility.