Characterization of sputtered amorphous platinum dioxide films

A study was conducted to analyze the amorphous phase of platinum dioxide films. Nanoindentation determinations were carried out to determine the hardness and Young modulus of the films deposited on fused silica. Results indicated that the interatomic coordinates of the precursor are intermediate of the crystalline phases. Findings also showed that the phase resulting from the amorphous form is unpredictable and depend on various effects such as film stress.