A methodology for automated quantitative microstructural analysis of transmission electron micrographs

A general methodology that combines conventional and newly developed image processing algorithms to extract and combine information from multiple, optimized transmission electron microscopy (TEM) micrographs is introduced. Systematic analysis of microstructures of thin films obtained from TEM micrographs and comparison with the results from a conventional, manual approach has validated the technique. Data from structural analysis show a good agreement between the two methods.