Design and optimization of high-speed resonant cavity enhanced Schottky photodiodes

A study was conducted to analyze the design and optimization of high-speed resonant cavity enhanced Schottky photodiodes. The resonant microcavity was formed between the semitransparent Schottky contact and a low-loss distributed Bragg reflector. Quantum efficiency was optimized during the minimization of the front-surface reflectivity for incident light. In addition, a dielectric layer was utilized to reduce front-surface reflectivity.