A 2-MHz 2-kW voltage-source inverter for low-temperature plasma generators: implementation of fast switching with a third-order resonant circuit

A third-order resonant circuit was designed to provide fast switching operation for a voltage-source series-resonant inverter that uses four metal oxide semiconductor field effect transistors (MOSFET's). With this resonant circuit, charging and discharging of MOSFET's output capacitance will be easy. Hence, the commutation period needed to turn the MOSFET on and off will be decreased. The third-order resonant circuit was tested in a 2-MHz 2-kW voltage source inverter, which is used for low-temperature plasma generators, and found to be effective.