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Near-noble transition-metal-based ohmic contacts to p-InP: comparison of Ni and Pd as a base metal

Authors :
Yamaguchi, Akira
Asamizu, Hirokuni
Okada, takeshi
Iguchi, Yasuhiro
Saitoh, Tadashi
Koide, Yasuo
Murakami, Masanori
Source :
Journal of Applied Physics. June 1, 1999, Vol. 85 Issue 11, p7792, 5 p.
Publication Year :
1999

Abstract

A study was conducted to analyze the electrical characteristics of near-noble transition-metal-based ohmic contacts with a M/Zn/M sandwiched structured produced on p-type InP. The minimum contact resistivities were determined in both the NiZn and PdZn contacts. The selection of a suitable base metal for InP ohmic contacts was then discussed. Results indicated that the ternary compounds formed at the Ni/InP and Pd/InP interfaces.

Details

ISSN :
00218979
Volume :
85
Issue :
11
Database :
Gale General OneFile
Journal :
Journal of Applied Physics
Publication Type :
Academic Journal
Accession number :
edsgcl.54956463