Doping study of superconductivity in YBCO films by ion implantation

The results of doping by ion implantation in YBCO films with five different ions were presented. The five ions are Ca, Na, Mg, Be and Li. The difference of ionic radii and heat of formation value served as the basis of ion selection. In the implantation process, ionic radii plays a critical role to crystal damage. Different doses of Ni ions were implanted to YBCO films to vary the resistance to the implanted film. Different values of Ni implanted structure resistance were then applied to the fabrication of chip resistors.