A 2-MHz 6-kVA Voltage-Source Inverter Using Low-Profile MOSFET Modules for Low-Temperature Plasma Generators

This paper presents a 2-MHz 6-kVA voltage-source inverter for low-temperature plasma generators. A new MOSFET module referred to as a 'mega pack' is specially designed and fabricated for high-frequency high-power applications. It has a low-profile package equipped with four terminal plates. The main circuit consists of a single-phase full-bridge inverter using the four new modules. The layout of the modules is characterized by two modules, which are placed back-to-back with each other, forming a half bridge. Both device and circuit designs achieve great reduction of stray inductance in the main circuit. A prototype inverter shows stable operation around frequencies as high as 2 MHz. Index Terms--Device packaging, high-frequency inverter, low-temperature plasma, power MOSFET, stray inductance.